Towards a Room Temperature Membrane Bolometer at the Environmental Thermal Fluctuation Limit

Sofia Brown^1,2, Ravid Shaniv¹, Christopher Reetz^1,2, Ruomu Zhang^1,2, Cindy Regal^1,2

¹JILA and National Institute of Standards and Technology, University of Colorado, Boulder CO 80309 USA; ²Department of Physics, University of Colorado, Boulder CO 80309 USA

 

Hamiltonian reconstruction through ringdown dynamics

Vincent Dumont¹, Markus Bestler², Letizia Catalini¹, Gabriel Margiani¹, Oded Zilberberg², Alexander Eichler¹

¹ETH Zurich, Switzerland; ²University of Konstanz, Germany

 

Mechanical characterization of Freestanding La2/3Sr2/3MnO3/CaTiO3/SrTiO3/Silicon microbridges for resonant bolometers.

Gaia Tarsi¹, Victor Pierron¹, Bruno Guillet¹, Stephane Flament¹, Daniele Marrè^2,3, Luca Pellegrino², Nicola Manca², Laurence Méchin¹

¹CNRS-ENSICAEN-GREYC-Université Caen Normandie, 6 Bd Maréchal Juin, Caen 14050, France; ²CNR-SPIN, C.so F. M. Perrone, 24, Genova 16152, Italy; ³University of Genoa - Department of Physics, Via Dodecaneso, 33, Genova 16146, Italy

 

String-based Optomechanical Sensing enhanced by Cavity Transduction

Bhavesh Kharbanda¹, Amirali Arabmoheghi², Letizia Catalini¹, Mohammad Bereyhi², Alessio Zicoschi², Tobias Kippenberg², Christian Degen¹, Nils Engelsen², Alexander Eichler¹

¹ETH Zürich, Switzerland; ²EPFL, Switzlerland

 

Near-resonant nuclear spin detection with high-frequency mechanical resonators

Diego A. Visani^1,2, Letizia Catalini^1,2, Christian L. Degen^1,2, Alexander Eichler^1,2, Javier del Pino^3,4

¹Laboratory for Solid State Physics, ETH Zürich, Switzerland; ²Quantum Center, ETH Zürich, Switzerland; ³Institute for Theoretical Physics, ETH Zürich, Switzerland; ⁴Department of Physics, University of Konstanz, Germany

 

Nano-optomechanical disk sensors

Elena Sentre-Arribas¹, Alicia Aparicio-Millán¹, Jose Jaime Ruz¹, Oscar Malvar¹, Ivan Favero², Arestide Lemaître³, Priscila Monteiro Kosaka¹, Sergio García-López¹, Montserrat Calleja¹, Javier Tamayo¹, Eduardo Gil-Santos¹

¹Instituto de Micro y Nanotecnología, IMN-CNM (CSIC), Isaac Newton 8 (PTM), 28760, Tres Cantos, Madrid, Spain.; ²Matériaux et Phénomènes Quantiques, CNRS, Université Paris-cité, 10 rue Alice Domon et Léonie Duquet, 75013, Paris, France.; ³Centre de Nanosciences et Nanotechnologies, CNRS, Université Paris-Saclay, 10 boulevard Thomas Gobert, 91120, Palaiseau, France

 

An optomechanical array based on a glass fiber

Motoki Asano, Hiroshi Yamaguchi, Hajime Okamoto

NTT Basic Research Laboratories, Japan

 

Frequency Counter with Phase Filtering for Resonance Frequency Monitoring in NEMS Resonators

Hajrudin Besic¹, Alper Demir², Johannes Steurer¹, Veljko Vukicevic¹, Silvan Schmid¹

¹Vienna University of Technology, Austria; ²Koc¸ University, Turkey

 

Diamagnetically levitated cavity optomechanics with low eddy current materials

Xianfeng Chen¹, Ruvi Lecamwasam¹, Ping Koy Lam^1,2

¹A*STAR Quantum Innovation Centre(Q.InC), Institute for Materials Research and Engineering(IMRE), Agency for Science, Technology and Research(A*STAR), 2 Fusionopolis Way, 08-03 Innovis 138634, Singapore; ²Centre for Quantum Computation and Communication Technology, Department of Quantum Science, Research School of Physics and Engineering, Australian National University, Canberra ACT, Australia

 

Integration of High-TC Superconductor with High Q Factor Oxide Mechanical Resonators

Nicola Manca¹, Alexei Kalaboukhov¹, Alejandro E. Plaza¹, Leonélio Cichetto², Eric Walhberg², Emilio Bellingeri¹, Francesco Bisio¹, Floriana Lombardi², Daniele Marré^1,3, Luca Pellegrino¹

¹CNR-SPIN, C.so F. M. Perrone, 24, 16152 Genova, Italy; ²Department of Microtechnology and Nanoscience – MC2, Chalmers University of Technology, SE 412 96, Gothenburg, Sweden; ³Dipartimento di Fisica, Università degli Studi di Genova, 16146 Genova, Italy

 

(La,Sr)MnO3 trampoline resonator for room-temperature bolometers

Nicola Manca¹, Alejandro E. Plaza¹, Leonélio Cichetto¹, Francesco Bisio¹, Daniele Marré^1,2, Luca Pellegrino¹

¹CNR-SPIN, C.so F. M. Perrone, 24, 16152 Genova, Italy; ²Dipartimento di Fisica, Università degli Studi di Genova, 16146 Genova, Italy

 

Simultaneous optical and mechanical sensing based on optomechanical resonators

Elena Sentre-Arribas¹, Alicia Aparicio-Millán¹, Aristide Lemaître², Ivan Favero³, Javier Tamayo¹, Montserrat Calleja¹, Eduardo Gil-Santos¹

¹Institute of Micro and Nanotechnology, IMN-CNM (CSIC), Spain; ²Centre des Nanosciences et Nanotechnologies, CNRS, Université Paris-Saclay, France; ³Matériaux et Phénomènes Quantiques, CNRS, Université Paris-Cité, France

 

Mass and mechanical properties characterization of single bacteria by multimode tracking of nanomechanical resonators

Alicia Aparicio-Millán, Elena Sentre-Arribas, Jose Jaime Ruz, Raquel Álvaro, Sergio García-López, Priscila Monteiro Kosaka, Montserrat Calleja, Javier Tamayo, Eduardo Gil-Santos

Instituto de Micro y Nanotecnología (IMN-CNM, CSIC)

 

Towards high-throughput nanomechanical mass spectrometry instrumentation for characterizing focused nanoparticles

Oscar Malvar¹, Manuel Gómez-Moreno¹, Jose Jaime Ruz¹, Priscila M. Kosaka¹, Sergio García-López¹, Manuel Abuín², Javier Martínez², Diamantis Kounadis³, Dimitris Papanastasiou³, Alvaro San Paulo¹, Montserrat Calleja¹, Javier Tamayo¹

¹Institute of Micro and Nanotechnology, IMN-CNM, CSIC, Spain; ²Instituto de Sistemas Optoelectrónicos y Microtecnología, ISOM-ETSI UPM, Madrid, Spain; ³Fasmatech Sience & Technology, Athens, Greece

 

Parametric normal mode splitting for estimating modal coupling strength in nanostrings

Ahmed A. Barakat, Avishek Chowdhury, Anh Tuan Le, Eva M. Weig

Technical University of Munich, Germany

 

Collective optomechanical effects in nanoparticle tweezer arrays

Uros Delic

University of Vienna, Austria

 

Slot-Mode Optomechanical System for Mass Sensing

Cheeru Thrideep¹, Miroslav Belov², Wayne Hiebert^1,2

¹University of Alberta, Canada; ²Nanotechnology Research Centre, National Research Council, Canada

 

Sensitivity and Resolution of Nanomechanical Spectrometry for Infectious Virus Detection

Manuel Gómez-Moreno, Juan Molina, José J. Ruz, Óscar Malvar, Javier Tamayo, Montserrat Calleja, Álvaro San Paulo

Instituto de Micro y Nanotecnología (IMN-CNM, CSIC) Tres Cantos, Madrid (Spain)

 

Pushing the Quality Factor Limits of Silicon Nitride Membranes Using Surface Engineering

Antonius Armanious, Geena Benga, John Abendroth, Alexander Eichler

ETH Zurich, Switzerland

 

Multimode Optomechanical Weighing and Elastometry of a Single Nanoparticle

Louis Waquier¹, Hamidreza Neshasteh¹, Samantha Sbarra¹, Stephan Suffit¹, Aristide Lemaître², Ivan Favero¹

¹Matériaux et Phénomènes Quantiques, Université Paris Cité, CNRS-UMR 7162, 75013 Paris, France; ²Centre de Nanosciences et de Nanotechnologies, CNRS, UMR 9001, Université Paris-Saclay, Palaiseau 91120, France

 

Coupled parametric resonator system using capacitively driven SiN membranes

Luis Mestre, Vincent Dumont, Suyash Singh, Alexander Eichler, Christian Degen

ETHZ, Switzerland

 

Glass frit bonding for vacuum encapsulation of piezoelectric suspended microchannel resonators

Saba Gholizadeh¹, Yara Abdelaal¹, Damien Maillard², Guillermo Villanueva¹

¹École Polytechnique Fédérale de Lausanne (EPFL), Switzerland; ²University of California, Santa Barbara, USA

 

AlScN Thin Films for the Transduction of Suspended Microchannel Resonators

Yara Abdelaal¹, Damien Maillard², Luis Guillermo Villanueva¹

¹Advanced NEMS Laboratory, Institute of Mechanical Engineering, École Polytechnique Fédérale de Lausanne (EPFL); ²Mechanical Engineering Department, University of California at Santa Barbara

 

Determining Localized Charge Distributions with MEMS

Denise Puglia¹, André Schidler², Silvan Schmid³, Andrew Higginbotham^1,4

¹IST Austria, Austria; ²Institute of Logic and Computation, TU Wien, Austria; ³Institute of Sensor and Actuator Systems, TU Wien, Austria; ⁴Pritzker School of Molecular Engineering, University of Chicago, USA

 

Characterizing cellular viscoelastic properties based on AFM indentation-relaxation experiments

Jia-Wei Ling, Neng-Hui Zhang

Shanghai Institute of Applied Mathematics and Mechanics, Shanghai Key Laboratory of Mechanics in Energy Engineering, School of Mechanics and Engineering Science, Shanghai University, Shanghai, 200072, China

 

Techniques for actuation and control of optomechanical resonators in liquids

Clément Le Fur¹, Hamidreza Neshasteh¹, Louis Waquier¹, Ilan Shlesinger¹, Marc Gély², Guillaume Jourdan², Ivan Favero¹

¹Matériaux Phénomènes Quantiques labs, Université Paris Cité, CNRS, Paris, France; ²LETI, CEA, Université Grenoble Alpes, Grenoble, France

 

Dielectrophoretic trapping in suspended microchannel resonator for multiphysical sensing

Alberto Martín-Pérez¹, Roberta Calmo¹, Andrea Lovera², Stefano Stassi¹, Carlo Ricciardi¹

¹Politecnico di Torino, Italy; ²Femtoprint, Switzerland

 

Method to differentiate Flexoelectricity from Piezoelectricity

Daniel Moreno-Garcia, Luis Guillermo Villanueva

EPFL, Switzerland

 

A voltage-controllable magnetic tip for scanning force microscopy

Shobhna Misra¹, Reshma Peremadathil Pradeep², Hans J. Hug², Christian Degen¹, Alexander Eichler¹

¹ETH Zurich, Switzerland; ²EMPA

 

Piezoelectric Trampoline Resonators for Nanomechanical Photothermal Sensing

Kevin T. Uning¹, Yara Abdelaal², Saba Gholizadeh², Damien Maillard³, Luis Guillermo Villanueva²

¹London Centre for Nanotechnology, Department of Biochemical Engineering, University College London, UK; ²Advanced NEMS Laboratory, Institute of Mechanical Engineering, École Polytechnique Fédérale de Lausanne, Switzerland; ³Mechanical Engineering Department, University of California, Santa Barbara, USA

 

Dip-in nanowire resonators for weighing nanoparticle analytes from nanoliter solutions

Juan Molina, Javier E. Escobar, Óscar Malvar, José J. Ruz, Priscila M. Kosaka, Javier Tamayo, Álvaro San Paulo, Montserrat Calleja

Instituto de Micro y Nanotecnología (IMN-CNM), CSIC, Spain

 

Mechanical phenotyping of breast cancer cells based on stochastic intracellular fluctuations.

Álvaro Cano Tortajada¹, Marina López yubero¹, Carmen Milla Pardo¹, Verónica Puerto Belda¹, José Jaime Ruz Martinez¹, Priscila Monteiro Kosaka¹, Monsterrat Calleja Gómez¹, Marcos Malumbres Martínez², Francisco Javier Tamayo De Miguel¹

¹IMN-CSIC, Spain; ²VHIO, Spain

 

Comparative Analysis of Nanomechanical Resonators for Photothermal Sensing

Kostas Kanellopulos, Friedrich Ladinig, Stefan Emminger, Paolo Martini, Robert G. West, Silvan Schmid

TU Wien, Austria

 

Square membrane resonators supporting degenerate modes of vibration for high-throughput mass spectrometry of single bacterial cells

Adrián Sanz-Jiménez, Jose Jaime Ruz, Eduardo Gil-Santos, Oscar Malvar, Sergio García-López, Priscila M. Kosaka, Álvaro Cano, Montserrat Calleja, Javier Tamayo

Instituto de Micro y Nanotecnología (IMN-CNM-CSIC), Spain

 

Towards Membrane-Based Single-Protein Mass Spectrometry

Geena Benga, Letizia Catalini, Christian Degen, Alexander Eichler

ETH Zurich, Switzerland

 

High-Q Mechanical Resonator for Optomechanical Sensing

Jin Chang, Simon Gröblacher

TUDelft, Netherlands, The

 

Energy dissipation analysis in polymer coated silicon nitride microbeam resonators

Lucia Crocetto¹, Tomás Manzaneque¹, Murali Ghatkesar²

¹Department of Microelectronics, TU Delft, Netherlands, The; ²Department of Precision and Microsystems Engineering, TU Delft, Netherlands, The

 

Observation and modelling of the optical non-linearity in high-Q silicon nanochain resonators

Chenyue Gu¹, Ruvi Lecamwasam¹, Biveen Shajilal¹, Mengting Jiang¹, Giovanni Guccione², Ping Koy Lam^1,2, Lu Ding¹

¹A*STAR Quantum Innovation Centre (Q.InC), Institute for Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, 08-03 Innovis 138634, Republic of Singapore; ²ARC Centre of Excellence for Quantum Computation and Communication Technology (CQC2T), Research School of Physics, The Australian National University, Canberra ACT 2601, Australia

 

Sub-millisecond digit recognition with reservoir computing based on nonlinear nanomechanical resonators under ambient conditions

Enise Kartal¹, M. Taha Yıldız¹, Batuhan E. Kaynak¹, Cenk Yanık², M. Selim Hanay¹

¹Bilkent University, Turkiye; ²Sabancı University, Turkiye

 

Advances In 3D Magnetic Resonance Force Microscopy

Nils Prumbaum, Raphael Pachlatko, Marc-Dominik Krass, Alexander Eichler, Christian Degen

ETH Zurich, Switzerland

 

Intrinsic Q-factor Enhancement with Trimethylchlorosilane Passivation in Silicon Nitride Resonators

Nicola Cavalleri, Robert Grayson West, Ariane Giesriegl, Silvan Schmid

Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria

 

AlN NEMS Resonators for Nonlinear Oscillator Networks

Scott T Habermehl¹, Damien Maillard², Isaiah J Curtis¹, Atakan B Ari¹, Luis G Villanueva², James P Crutchfield³, Michael L Roukes¹

¹California Institute of Technology, United States of America; ²École Polytechnique Fédérale de Lausanne (EPFL), Switzerland; ³University of California, Davis, United States of America

 

Two-Level Systems Interactions with Piezoelectric Lithium Niobate Nanomechanical Resonators

Mert Yuksel¹, Matthew Peter Maksymowych², Oliver Andrew Hitchcock², Felix Mayor², Nathan Lee², Amir Hossein Safavi-Naeini², Michael Lee Roukes¹

¹California Institute of Technology, United States of America; ²Stanford University, United States of America

 

An analytical model of multistep injection–purge cycles for static mode nanomechanical sensors with viscoelastic coatings

Kosuke MINAMI¹, Kota Shiba¹, Genki Yoshikawa^1,2

¹National Institute for Materials Science (NIMS), Japan; ²University of Tsukuba, Japan

 

Simulation of air-coupled PMUTs with integrated polymer material and cross-slit membranes to enhance the transmission and receiving sensitivity

Mohammadsadegh Namnabat^1,2, Annalisa De Pastina¹, Luis Guillermo Villanueva²

¹Silicon Austria Labs GmbH, Microsystems, Villach, Austria; ²Advanced NEMS Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Switzerland

 

Enhancing Sensitivity in MEMS-based Temperature Sensors by Leveraging Higher Mode Resonance Frequency of VOx Coated Microcantilever

Jay Krishna Anand, Durgesh Banswar, Shailendra Kumar, Ujjwal Chitnis, Ankur Goswami

Indian Institute of Technology Delhi, India

 

Feedback stabilization of a nanosphere in a repulsive potential

Vojtech Mlynar¹, Jakob Rieser², Salambo Dago², Mario Arnolfo Ciampini², Markus Aspelmeyer², Nikolai Kiesel², Andreas Kugi¹, Andreas Deutschmann-Olek¹

¹Automation and Control Institute (ACIN), TU Wien, Vienna, Austria; ²Vienna Center for Quantum Science and Technology (VCQ), University of Vienna, Vienna, Austria

 

Discrimination of 2-nonenal from saturated aldehydes by sorption kinetic parameters using nanomechanical sensors

Yingcheng Zhou^1,2, Kosuke Minami², Gaku Imamura^2,3, Kota Shiba², Genki Yoshikawa^1,2

¹Graduate School of Pure and Applied Science, University of Tsukuba, Japan; ²Research Center for Macromolecules and Biomaterials,National Institute for Materials Science (NIMS), Japan; ³Graduate School of Information Science and Technology, Osaka University, Japan

 

Probing exotic phases in bilayer graphene with NEMS

Parmeshwar Prasad¹, Rajashree Haldankar¹, Dilan P Paredes¹, David A Czaplewski², Adrian Bachtold¹

¹ICFO- The Institute of Photonic Sciences, Spain; ²Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439

 

Structural Optimization of Nonlinear Dynamics in Nanoresonators

Zichao Li¹, Minxing Xu^1,2, Richard A. Norte^1,2, Alejandro M. Aragón¹, Farbod Alijani¹, Peter G. Steeneken^1,2

¹Department of Precision and Microsystems Engineering, Delft University of Technology; ²Kavli Institute of Nanoscience, Delft University of Technology

 

Confocal Atomic Force Microscopy

Ruben Guis¹, Zili Zhou², Umit Arabul², Gerard Verbiest¹

¹Delft University of Technology, Netherlands; ²ASML Netherlands B.V., Netherlands

 

Microwave-frequency dielectric loss in Si3N4 induced by self-heating and reduced by annealing

Sarang Mittal^1,2, Kazemi Adachi^1,2, Nicholas E. Frattini^1,2, Maxwell D. Urmey^1,2, Sheng-Xiang Lin^1,2, Alec L. Emser^1,2, Cyril Metzger^1,2, Luca Talamo^1,2, Sarah Dickson^1,2, David Carlson^3,2, Scott Papp^4,2, Cindy A. Regal^1,2, Konrad W. Lehnert^1,2

¹JILA, National Institute of Standards and Technology and the University of Colorado, Boulder; ²Department of Physics, University of Colorado, Boulder; ³Octave Photonics LLC; ⁴Time and Frequency Division, National Institute of Standards and Technology

 

Ultra-sensitive photonic-MEMS accelerometers for next generation seismic sensors

Farnaz Ebrahimi^1,2, Ayman Manzoor¹, Hamed Sattari¹, Yves Petremand¹, Dara Bayat¹, Guido Spinola Durante¹, Arno Hoogerwerf¹, Amir Hossein Ghadimi¹, Michel Despont¹

¹CSEM, Switzerland; ²Department of Physics, ETH Zürich, Switzerland

 

Advancing AFM-IR with Ultra-High Frequency Probes and Optomechanical Photonic Crystal Nanobeam Cavity Sensors

Yide Zhang^1,2,3, Gautham Vijayan^2,3, Artem Vorobev^2,3, Georg Ramer¹, Liam O’Faolain^2,3

¹Institute of Chemical Technologies and Analytics, TU Wien, Austria; ²Centre for Advanced Photonics and Process Analysis, Munster Technological University, Ireland; ³Tyndall National Institute, Ireland

 

Towards photon-noise limited optomechanical thermal IR detector

Paolo Martini, Kostas Kanellopulos, Stefan Emminger, Silvan Schmid

Institute of Sensors and Actuator Systems, TU Wien, Gusshausstraße 27-29, 1040 Vienna, Austria

 

Leveraging Optical Lever Techniques for NEMS Resonators

Johannes Hiesberger, Thomas Tropper, Silvan Schmid

Technical University of Vienna, Austria

 

Spotting Trace Impurities: Unveiling Contaminants with NEMS-IR

Jelena Timarac Popovic¹, Johannes Hiesberger^1,2, Josiane P. Lafleur², Silvan Schmid¹

¹Vienna University of Technology, Austria; ²Invisible-Light Labs GmbH

 

Microfluidic cantilever probe designs for cellular and subcellular studies

Vijayendra Umesh Shastri, Murali Krishna Ghatkesar

TU Delft, Netherlands, The

 

Quantum dynamics of Dissipative Kerr solitons

Kilian Seibold^1,2,3, Riccardo Rota^2,3, Fabrizio Minganti^2,3, Vincenzo Savona^2,3

¹Department of Physics, University of Konstanz, 78464 Konstanz, Germany; ²Institute of Physics, Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015, Lausanne, Switzerland; ³Center for Quantum Science and Engineering, Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland

 

CNT resonators on axial MEMS straining platform

Morten Vollmann, Cosmin Roman, Christofer Hierold

ETH Zürich, Switzerland

 

Measurements of cryogenic mirror noise and its impact on single-photon readout of cavity optomechanical systems

Luca G. Talamo^1,2, Sarah Dickson^1,2, Maxwell D. Urmey^1,2, Sarang Mittal^1,2, Kazemi Adachi^1,2, Sheng-Xiang Lin^1,2, Nicholas E. Frattini^1,2, Konrad W. Lehnert^1,2, Cindy A. Regal^1,2

¹JILA, United States of America; ²University of Colorado Boulder, United States of America

 

Transverse Vibration of Silicon Nanowires: Surface Properties

Sina Zare Pakzad¹, Mohammad Nasr Esfahani², Zuhal Tasdemir³, Yusuf Lelebici^4,5, B. Erdem Alaca^1,6,7

¹Department of Mechanical Engineering, Koç University, 34450 Sariyer, Istanbul, Turkey; ²School of Physics, Engineering and Technology, University of York, York, YO10, 5DD, York, UK; ³Laboratory of Micro and Nanotechnology, Paul Scherrer Institute, Villigen CH-5232, Switzerland; ⁴Microelectronic Systems Laboratory, Swiss Federal Institute of Technology − Lausanne (EPFL), Lausanne CH-1015, Switzerland; ⁵Rectorate, Sabanci University, Istanbul 34956, Turkey; ⁶n2STAR-Koç University Nanofabrication and Nanocharacterization Center for Scientific and Technological Advanced Research, Koç University, 34450 Sariyer, Istanbul, Turkey; ⁷Koç University Surface Technologies Research Center, Koç University, 34450, Istanbul, Turkey

 

Experimental realization of nonreciprocal adiabatic transfer of phonons in a dynamically modulated nanomechanical topological insulator

Jingwei Zhou

University of Science and Technology of China, China, People's Republic of

 

Nanomechanical Thermal Response Modelling for Optimal Signal Estimation via Kalman Filtering

Hajrudin Besic, Andreas Deutschmann-Olek, Kenan Mesic, Kostas Kanellopulos, Silvan Schmid

TU Wien, Institute of Sensor and Actuator Systems, Gusshausstrasse 27-29, 1040 Vienna, Austria.

 

How bandwidth and sample points affect precision of Q-factor measurements in PiezoMEMS resonators

Michael Schneider^1,2, Ulrich Schmid¹

¹Institute of Sensor and Actuator Systems, TU Wien, Austria; ²Christian Doppler Laboratory for Piezoelectric Silicon MEMS with Enhanced Sensitivity and Responsivity, Institute of Sensor and Actuator Systems, TU Wien

 

Sensitivity tuning of silicon photonic ultrasound sensors by the opto-elasticity of polymer coating

Ramazan Tufan Erdogan¹, Georgy Alexandrovich Filonenko², Stephen James Picken³, Peter Gerard Steeneken¹, Wouter Jan Westerveld¹

¹Department of Precision and Microsystems Engineering, Delft University of Technology; ²Department of Materials Science and Engineering, Delft University of Technology,; ³Advanced Soft Matter, Delft University of Technology